Glass, Fused Silica & Quartz
BOROFLOAT® 33 / B270 / D263 / BK7 etc.
Eagle XG, Fused Silica 7980 / 7978 / 7979 etc.
Fused silica JGS1 / JGS2 & single quartz etc.
SCROLL
| Specification | Unit | 4" | 6" | 8" | 10" | 12" |
| Diameter | mm | 100 | 150 | 200 | 250 | 300 |
| Tolerance (±) | mm | ±0.05 | ||||
| Thickness | mm | 0.1–2 | ||||
| TTV | μm | <2 | <3 | <3 | <3 | <3 |
| Bow | μm | ≤10 | ≤20 | ≤20 | ≤20 | ≤20 |
| Warp | μm | ≤10 | ≤30 | ≤30 | ≤30 | ≤30 |
| Surface Quality | — | 20/10 | ||||
| Surface Roughness / Ra | nm | ≤5 | ||||
| Edge Chamfer | — | 45°, C0.2±0.1 mm | ||||
| Packaging | — | Cleanroom-sealed packaging / PE protective film / Wafer cassette / Wafer container | ||||
