Glass and Quartz
SCROLL
| Specification | Unit | Reference spec |
| Size | mm | 152 × 152 × 6.35 |
| Tolerance | mm | OD ±0.2; T ±0.1 |
| Edge Chamfer | — | 90° ±5′; C0.3–0.6 × 45° |
| Ra | nm | Front ≤0.4; side ≤5 |
| TTV | μm | ≤2 |
| Edge quality | — | No pits, chips or edge breakage |
| Packaging | — | Mask Package Box |
