Glass, Fused Silica & Quartz
BOROFLOAT® 33 / B270 / D263 / BK7 etc.
Eagle XG, Fused Silica 7980 / 7978 / 7979 e tc.
Fused silica JGS1 / JGS2 & single quartz etc
SCROLL
| Specification | unit | 310 ×310 mm | 515 ×510 mm |
| Dimensional Tolerance (±) | mm | ±0.05 | |
| Thickness | mm | 0.5–3 | |
| TTV | μm | ≤3 | |
| Warp | μm | ≤30 | ≤200 |
| Surface Quality | 20/10 | ||
| Surface Roughness / Ra | nm | ≤0.2 | |
| Packaging | Cleanroom-sealed packaging / PE protective film / PET box | ||
